ASML’s most advanced EUV machine

Date: Tuesday 21 March 2023

Location: University of Twente, Vrijhof /Amphitheater

ASML is a Dutch company playing a key role in making the latest generation of chips. How does their most advanced Extreme Ultraviolet machine work? What are the possibilities to make ever smaller and more powerful chips? The optics, made by Zeiss, all contain a bit of technology developed in Twente. Dr. Frank Schuurmans, VP of research at ASML, will talk about the future of chip making and dr. Hartmut Enkisch, principal engineer at Zeiss R&D, about the world’s most advanced optics which are needed to make these machines work.


This lecture is organized in cooperation with Studium Generale.